Local Three-Dimensional Characterization of Nonlinear Grain Boundary Length within Bulk ZnO Using Nanorobot in SEM

Aiming at the problems of lack data on nonlinear morphology to divide uneven grain boundary in bulk ceramics, a unique approach nanorobot-based characterization three-dimensional structure length can be creatively proposed under scanning electron microscope quantify actual local micro-area ZnO. Contour shapes targeted boundaries plane X-Y imaged using SEM. Z-directional relative height differences different positions sequentially probed by nanorobot. Experiments demonstrate that it is effective characterize structures materials. By quantifying differences, verified show irregular characteristics exist length, which extend depth effect conductance. Furthermore, this method also obtain quantitative topographies analysis polycrystalline